Online Measurement Method of Ion Beam Processing Removal Function Based on Convolution Effect Correction
Recently, the Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, published a research paper entitled "Investigating a corrective online measurement method for the tool influence function in millimeters spot-sized ion beam figuring" in *Light: Advanced Manufacturing *. The first author is Researcher Haixiang Hu, the second author is Master's student Meng Bian, and the corresponding authors are Haixiang Hu, Wa Tang, and Peng Ji. This research proposes a high-precision online measurement method for the removal function based on convolution effect correction, used for online, rapid, and accurate calculation of small beam diameter removal functions in ion beam processing. For removal functions with a half-width at half-maximum (FWHM) of 0.5 mm to 1 mm, the calculation accuracy can be controlled to around 3%. This technique has been successfully applied to the precision shaping of large-aperture aspherical surfaces, reducing the RMS surface shape error from 1.7 nm to 0.4 nm in the spatial wavelength range of 15 mm to 3.6 mm.
The ultra-high brightness and high coherence X-ray beams generated by next-generation synchrotron radiation sources and X-ray free-electron laser devices provide revolutionary tools for exploring the nanostructures and fundamental processes of matter. As a core optical component, the surface accuracy of the X-ray mirror directly determines the beam focusing performance and imaging quality. Correcting surface errors in the spatial wavelength range of 1 mm to 10 mm places extremely high demands on the characteristics of the processing tools. Ion beam processing technology, with its highly flexible removal function, demonstrates significant advantages in addressing this problem. When the beam diameter of the removal function is reduced to the millimeter or even sub-millimeter level, this portion of the surface error can be effectively eliminated.
Accurate measurement of the small-beam-diameter removal function is crucial in this process. Especially during long-term processing of large-aperture mirrors, not only is a precise removal function required, but also real-time monitoring, evaluation, and compensation for its stability are essential to ensuring processing precision. However, experimental measurement methods cannot achieve this: removal function data can only be obtained after processing, causing fluctuation compensation to be delayed until the next reshaping cycle. Furthermore, auxiliary processes such as vacuuming and testing further increase time costs. Therefore, achieving high-precision online measurement of the small-beam-diameter removal function is a core prerequisite for improving the accuracy and efficiency of ion beam processing.

