Yongjiang Lab put into operation an 8-inch line of micro-nano platform. Comes with one 6-inch R&D line and one 8-inch verification line with 165 sets of high end precision equipment.
Chinese semiconductor thread II
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Yongjiang Lab put into operation an 8-inch line of micro-nano platform. Comes with one 6-inch R&D line and one 8-inch verification line with 165 sets of high end precision equipment.
Chinese semiconductor industry
I call upon our experts here: is this really as important as it is being described or is this your usual SCMP hype...
www.sinodefenceforum.com
Chinese semiconductor thread II
Zhongke Chuangxing leads the investment in advanced electronic materials developer "Anchu Technology" Zhangjiagang Anchu Technology Co., Ltd. (hereinafter referred to as "Anchu Technology") announced that it has completed the Pre-A round of financing. This round of financing was led by Zhongke...
www.sinodefenceforum.com
Hyper-reduction-accelerated data assimilation method in thermal deformation analysis of lithography masks.
Abstract
Thermal deformation of the mask is a major contributor to imaging errors in extreme ultraviolet lithography (EUVL), with uncertainty in the coefficient of thermal expansion (CTE) curve playing a critical role. Rapid and accurate prediction of mask thermal deformation from limited measurements in industrial production is essential to ensure lithographic imaging quality. Therefore, this study proposes an accelerated data assimilation framework for thermo-mechanical analysis of EUVL masks to inversely predict the CTE curve, and thus improve the accuracy of the thermal deformation online. By employing thermo-mechanical hyper-reduced-order models (HROMs), the computational process of the Ensemble Kalman filter is significantly accelerated. The influences of sensor density and measurement noise on the accuracy of CTE curve estimation are also investigated, demonstrating good robustness. Compared with the full-order model, the HROM achieves a relative error of only 1 × 10−4 while improving computational efficiency by 3 to 4 orders of magnitude. Moreover, the estimated CTE curve exhibits a relative error of just 1 × 10−2 compared with the true curve. Using the predicted CTE curve, online monitoring of the mask can reduce displacement field errors by ∼20 %. The proposed model, is effective for online monitoring of mask thermal deformation and enhancing lithographic imaging quality.
Guanggang Gas's Super-N 50K ultra-high purity nitrogen generator has successfully completed trial operation!
Recently, another piece of good news came from the Guanggang Gas project site—the Super-N 50K ultra-high purity nitrogen generator, tailor-made for key customers, has been successfully put into trial operation after rigorous debugging! From the "breakthrough" of 30K to the "upgrade" of 50K, in just over a year, Guanggang Gas has written a brilliant answer sheet of "continuous breakthrough" in the field of domestic high-end semiconductor nitrogen generation with the acceleration of independent research and development, and added key support to the independent control of China's semiconductor industry.
The successful trial operation of the Super-N 50K ultra-high purity nitrogen generator not only represents another leap forward in Guanggang Gas's technological strength but also marks a significant step towards self-reliance and control in China's semiconductor industry. In the future, Guanggang Gas will continue to increase its R&D investment, continuously enhance its technological innovation capabilities, and provide customers with higher-quality and more efficient products and services. We believe that through continuous efforts and innovation, Guanggang Gas will contribute more to the high-quality development of China's semiconductor industry and help "Made in China" reach the center of the world stage.
dumb question on my part but what is ultra-high purity nitrogen used for in the semi processes?
Because is usually a buffer gas, the purity has to be really high depending on the process. Mainly because any trace molecules will react and ruin your process or affect yield. I have read values between 5N (99.999%) for some process or even 6N (99.9999%) for advanced process.
Nice paper about the purity of semiconductor fabrication materials.
This headline is misleading. There are three components to the seizure. They only reversed one so far.
1) Removed the Chinese CEO and install Stefan Tilger as CEO (by court order)
2) Seize the share voting rights of WingTech (by court order)
3) Enforce government control over internal decisions of Nexperia (by ministerial order)
They have temporarily suspended the number 3 from above. So nothing has really changed for WingTech yet, as Nexperia HQ is still run by the rogue management. Suspending number 3 does not give WingTech the ability to change the board or management.
They have to at least undo number 2 even if they don't reinstate Wing as CEO. If they do that it would be enough for WingTech to take control by firing the rogue management and then electing a new CEO of WingTech's choice.
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