The Guangdong University of Technology's provincial and ministerial co-construction National Key Laboratory of Precision Electronic Manufacturing Technology and Equipment reported a breakthrough. Professor Chen Xin/Chen Yun's team, together with industry leaders such as Suzhou Maxwin Technology Co., Ltd., has made major breakthroughs in the research and development of key core technologies and equipment in the field of Mini/MicroLED display. The relevant results have been industrialized and applied, helping my country's new display industry to develop with high quality.
As a new generation of display technology, Mini/Micro LED has the advantages of high brightness, high contrast, and low power consumption, which is in line with the "dual carbon" strategic orientation and has huge market potential in consumer electronics, high-end display and other fields. However, high-efficiency and high-yield chip mass transfer and bonding technology has long been the focus of international technology competition.
With the support of the "Intelligent Robot" project of the National Key R&D Program, the team of Guangdong University of Technology invented a new principle of two-dimensional high-frequency coordinated flying thorn crystals. Through the technical combination of "flying thorn crystals to increase speed, macro-micro composite to ensure accuracy, and directional compensation to increase yield", they built a full-chain independent technology system covering transfer methods, bonding processes, core components, and system control. In order to solve the problem of transferring Micro LEDs of smaller sizes, the team further broke through key technologies such as high-speed precision alignment, laser process coordination, and error compensation, and has obtained more than 20 invention patents in China and the United States.
Through in-depth industry-university-research cooperation with Suzhou Maxwin Technology Co., Ltd., a leading pan-semiconductor equipment company, scientific research results have been quickly transformed into real productivity. The flying thorn crystal mass transfer robot jointly developed by the two parties has achieved a leapfrog improvement in performance indicators and significantly reduced raw material consumption and manufacturing costs.
This equipment not only reaches the international leading level in technical indicators, but also realizes the batch shipment of Mini LED mass transfer production line, which is equipped with "Chinese core" for my country's display industry. At present, the relevant equipment has been applied on a large scale in commercial and consumer scenarios such as large-screen display, all-in-one conference machine, and home theater, promoting the upgrading of my country's high-definition display industry.
While making breakthroughs in Mini LED technology, the joint research team formed by Guangdong University of Technology and Maxwin Technology (Zhuhai) Co., Ltd., a subsidiary of Suzhou Maxwin Co., Ltd., has targeted the frontier field of Micro LED and achieved the localization of equipment such as laser stripping, giant transfer, bonding, and repair. The G3.5 generation line laser bonding equipment has been delivered to customers. The team pioneered a comprehensive solution for silicon-based Micro LED hybrid bonding wafer reconstruction, covering key equipment for the entire process such as wafer polishing, femtosecond laser cutting, plasma processing, and hybrid bonding. It integrates semiconductor integration technology with new display innovations, opening up a new path for large-scale mass production of ultra-high-definition displays.