RSLASER making progress on the commercialization MHZ range Solid State DUV Source, we could see more DUV maskless lithography.
High-end deep ultraviolet quasi-continuous solid laser light source achieves domestic substitution
Deep ultraviolet quasi-continuous solid laser light sources have a wide range of application scenarios and have unique technical advantages in material surface detection (semiconductor wafer defect detection, etc.), laser induced breakdown spectroscopy ( LIBS) , laser induced fluorescence ( LIF ), ultraviolet Raman spectrometer, laser fine micromachining (laser direct writing, laser induced plasma processing, optical Bragg grating writing), etc. These applications have similar requirements for light sources: short wavelength, narrow spectral linewidth, high power, good repetition frequency, high stability and high reliability.
With the increasing demand for high-end deep ultraviolet light sources in the 266nm and below bands in China , there are procurement risks for imported light sources with a monopoly position abroad , and it is difficult to guarantee the after-sales timeliness of the products. Domestic related industries are in urgent need of domestic substitution of high-end deep ultraviolet light sources . In this context, Beijing Keyi Hongyuan Optoelectronics Technology Co., Ltd. (hereinafter referred to as Keyi Hongyuan ) actively carries out scientific research and breakthroughs in many key core technical difficulties using the existing optical, mechanical, electrical , control, and measurement complete R&D systems , forming high-end deep ultraviolet light source products with high stability and reliability . This series of products has completely independent intellectual property rights and can achieve domestic substitution of high-end deep ultraviolet light sources .
Keyi Hongyuan has launched a variety of deep ultraviolet shelf products, mainly concentrated in the 2.13 nm and 2.66 nm bands. It has developed 4 mature models with pulse widths less than 10 ps , spectral line widths less than 15 pm , and repetition frequencies of 1MHz /70MHz . The technical parameters are comparable to those of high-end deep ultraviolet light sources of imported products . Among them, the high - repetition-rate, high-power picosecond solid- state laser light source in the 266nm band has been successfully launched on the market, and commercial orders have been formed in the semiconductor testing industry and the laser fine micro-machining industry.
Since the single photon energy of deep ultraviolet laser is high, nonlinear crystals are easily damaged, and ensuring long-term reliability is a challenge. Keyi Hongyuan independently develops and designs power stability control algorithms with independent intellectual property rights, fully automatic point shifting, high beam quality design, purge filter protection design, etc. to ensure the long-term reliability and stability of products, meet the actual needs of industrial users for long-term reliability, and has reached the world's advanced level: single-point life can achieve continuous operation for more than 1,000 hours, 1,000- hour average power RMS < 0.5 % , and beam quality M² less than 1.2 , which has surpassed the level of similar imported products.
At the same time, Keyi Hongyuan is actively developing the same type of higher repetition rate 120MHz deep ultraviolet high-power industrial-grade solid laser light source, and in response to the actual needs of more types of industrial users, it has carried out the research and development of 266nm high-power solid lasers with tunable pulse width of 2-7ns and tunable frequency of 1Hz - 1MHz . At present , the above models have completed the scheme verification and process finalization, and are in the process of product production. They will soon form shelf products and be put on the market, providing more choices for domestic industrial users of high-end deep ultraviolet light sources.
In addition to the deep ultraviolet quasi-continuous lasers in the 266 nm and below bands introduced above , Keyi Hongyuan has also developed multiple laser product series in other bands , including 532nm , 355nm and other products that meet the needs of industrial customers for high reliability and long-term stability, and the technical indicators have reached the domestic advanced level . As a domestic high-end laser manufacturer, the company has conducted in-depth communication with customers to understand customer pain points, improve customer satisfaction and user experience, provide professional customized products, and ensure product quality and delivery cycle while meeting technical indicator requirements.
