Breaking through the "purity barrier" of graphite by developing high-temperature purification equipment for SiC
Shanxi CETC Electronic Equipment Co., Ltd., a subsidiary of CETC Electronic Equipment Group Co., Ltd. under China Electronics Technology Group Corporation broke through the industry's traditional design and, in collaboration with leading equipment manufacturers, independently developed a continuous graphite purification process and equipment . Through a combination of tiered purification technologies, including physicochemical purification, low-temperature and high-temperature continuous purification, and ultra-high vacuum purification, the purity of graphite was increased from 95% to over 99.99995%.
After multiple tests and verifications, the equipment can now efficiently remove metallic and non-metallic impurities from graphite powder. The purity of the ultra-high purity graphite powder used for the synthesis of third-generation semiconductor SiC can be stably controlled below 0.5×10⁻⁶ , fully meeting the industry's stringent requirements for ultra-high purity graphite powder.