On April 11, the launch ceremony of the lithium niobate photonic chip production line of Jiangsu Nanjing Nanzhi Advanced Optoelectronics Integration Technology Research Institute (hereinafter referred to as "Nanzhi Optoelectronics") was held in Nanjing Jiangbei New District .
The project is equipped with 350 million yuan worth of equipment and a 5,000m2 ultra -clean room, covering the core processes of the entire industry chain, with a monthly production capacity of 1,000 wafers. The production line launched this time has a series of core technology processes such as photolithography, etching, coating, grinding and polishing, and wet methods, which means that the industrialization of domestic thin film lithium niobate photonic chips has made important progress.
It is understood that in 2018, with the support of Nanjing University and Nanjing Jiangbei New District, Zhu Shining, currently an academician of the Chinese Academy of Sciences and director of the Jiangsu Provincial Optoelectronic Technology Innovation Center, led a team to implement Nanzhi Optoelectronics in the Industrial Technology Research and Innovation Park of the New District and was responsible for the construction and operation of optoelectronic public technologies. Platform, aiming at the needs of next-generation optoelectronic chip technology in basic materials, device processes, etc., to carry out research and development work.
At the beginning of this year, Nanzhi Optoelectronics started the construction of the second phase of the platform. Currently, the second phase of the platform has certain mass production capabilities. A batch of 8-inch biological genetic detection chips just rolled off the production line a month ago. All relevant performance indicators meet customer customization requirements. Zhu Shining said that in the future, based on the lithium niobate photonic chip production line, Nanzhi Optoelectronics will be able to provide chip research and development and tape-out support to domestic and foreign optoelectronic companies.