Shanghai Institute of Optics and Fine Mechanics makes progress in vibration measurement using large-aperture Fizeau interferometers
Recently, the research team led by Professor Liu Shijie at the Optical Detection and Characterization Center of the High-Power Laser Components Technology and Engineering Department of the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, has made progress in the research of vibration-resistant measurement technology for large-aperture, high-resolution interferometers. The relevant findings, titled " Three-step iteration-based vibration-resistant measurement technique for large-aperture high-resolution interferometers," have been published in *Optics and Lasers in Engineering *.
While the traditional three-step least squares iterative method ( TIA ) can achieve vibration compensation and wavefront recovery in interferometric measurements, it suffers from significant drawbacks such as high computational load and low processing efficiency when applied to large-aperture, high-resolution testing scenarios. To address this technical bottleneck, the research team proposed a three-step iterative vibration-damping phase recovery technique ( VibeResPhase ). This method innovatively separates vibration parameter identification and wavefront phase recovery into separate modules, significantly optimizing the computational logic while ensuring measurement accuracy.
The research team conducted experimental verification on a Φ600mm Fizeau interferometer , demonstrating that the VibeResPhase method improves measurement efficiency by more than 8 times compared to the traditional TIA method . This technology balances measurement accuracy and computational speed, is suitable for large-aperture, high-resolution wavefront vibration measurement scenarios, and provides strong support for the precise measurement of wavefront errors of large-aperture optical components in complex environments.
