China has developed many prototypes over the years. In 2016, they developed a prototype of a 90nm lithography machine. In 2023 they developed a prototype of a 28nm lithography machine. Now they have supposedly developed a prototype of an EUV lithography machine. The problem is that we have never heard proof that any of these prototypes ever made it to the mass production for commercial use stage. The only machines in use for mass production are ASML, and to a lesser extent, Nikon and Canon. At this point, I'd be more impressed with a confirmed report of any Chinese front end lithography machine of any node size in use for mass production on a commercial line, than another prototype of even the most advanced capability.
It's very interesting that this may patents are coming out right now on different EUV components (or at least can be applied to EUV machine). It seems like they are still making some critical breakthroughs in it. There is possibly improvements being made on subsystem level to address whatever issues they are uncovering during testing.
See the problem is they wrote "extreme ultraviolet lithography" without "EUV" in brackets, which immediately cut number of westerners who understand what it is by 75%
A document drafted in 2023 probably means that it's reporting/analyzing 2020-2022 news. 3-5 years is an eternity in this space. It's completely out of date.
That depend on the light source. But ASML pilot tools where in the range of 50-100 WPH. My guess in that range.