It’s very hard to get marginal improvement on mirror reflectivity, since the higher energy your photons are the more energy they impart to the surfaces they encounter, the harder it becomes to control scatter, and the more photochemical interactions you induce. There are material limitations at work here, and if the materials at hand allowed for better reflectivity it would have already been done. It’s still much easier to increase output than to reduce degree and range of kinetic interactions between your light output and your optics. One potential path is to just use fewer mirrors, but there’s probably a limit to how much you can lean on that since you needed mirrors in the first place in part to control beam shape necessary to scan ever finer details. That said, the fact that you already have commercial EUV scanners used in production means that there’s already a known optimal configuration of mirrors to get effective scanning, so there’s really no need to reinvent the wheel here.Thanks to gelgoog, SleepyStudent and Skywatcher.
If I understand correctly, in EUV the mirroring process absorbs about 96% of the available light thereby not only reducing the usefulness of the light source but also heating the mirrors themselves and consequently making them not too sharp.
So, if a better optical system is developed, could a less powerful lighting system, such as the one used in DUV equipment, suffice? Maybe the secret is more in improving the reflectiveness of the mirrors, than the light source.