Freesys (Shanghai) Precision Instruments Co., Ltd. (hereinafter referred to as Freesys Instruments) is a high-tech innovative enterprise specializing in the research and development and production of precision surface measurement equipment. Based on its independently developed technology, the company has successfully launched flagship products such as domestically produced atomic force microscopes (AFM), white light profilometers (WLI), and AFM-WLI combined systems. The core team members are all graduates of the Department of Precision Instruments at Tianjin University, possessing decades of technical expertise and practical experience in advanced measurement. Relying on a collaborative layout of "Shanghai headquarters + Tianjin R&D + Suzhou manufacturing," Freesys Instruments has built a complete closed loop from technological breakthroughs to industrialization, committed to providing high-performance, stable, and reliable domestically produced precision measurement solutions for cutting-edge fields such as scientific research, compound semiconductors, Micro-LEDs, and new displays.
AFM-Baritone 200mm Atomic Force Microscope
The AFM-Baritone is a large-scale atomic force microscope developed for scientific research and high-end industrial users. It is equipped with a 200 mm fully automated sample stage and can be used for the morphology and physical property detection of wafers and other samples of various sizes up to 8 inches.
• Employing a three-dimensional orthogonal scanning probe avoids the limitations imposed by the lower scanning architecture on sample size and weight.
• Standard features include automatic needle change and automatic dimming, and support for variable speed scanning and gain self-tuning.
• XYZ scan range: 100 μm × 100 μm × 15 μm
• Z-direction noise level ≤ 0.05 nm RMS value
AFM-Piccolo Freesys Desktop Ultrathin Probe Atomic Force Microscope
The AFM-Piccolo is a desktop atomic force microscope specifically developed for scientific research users. It is equipped with an ultra-thin optical lever probe, and the space above and in front of the probe is completely open, making it particularly suitable for in-situ integration with various high-resolution optical microscopy systems.
• Supports sample sizes with a diameter ≤ 30 mm and a thickness ≤ 5 mm
• XYZ scan range: 100 μm × 100 μm × 5 μm (optional: 10 μm/15 μm/20 μm)
• Z-direction noise level ≤ 0.04 nm RMS value