Yes it is clearly a leap in euv lithograph that the loght source is 150 kw to 400 kw however mass production of these machine remains an issue , other problems might be ziess lens which are incredibly hard to replicate cuz they have just 50 pecometer accuracy however we must consider china should have other ways to get euv machine maybe second hand who knows or other particle accelerator projectA “factory floor” is an extremely ambiguous description and might as well be indistinguishable in size from a truck. Not all factory floors are the size of giant warehouses, and it’s not clear to me if the factory floor description is just a reflection of the prototype being in a modularly assembled state to make it easier to do development work. When everything is packed together it’s much harder to do the constant repair, adjustment, and component swapping that’s typical of the development process. Either way size of the equipment is not really an issue here since they basically are all large enough to require very large exclusively dedicated spaces in fabs.
ASML’s light source power was only at 10 watts in 2010. Figures thrown around for the Shenzhen instrument seem to range between 150 and 400 watts.