There are two really important areas that are advancing pretty fast in China, this two areas are not just important for frontend lithography machine manufacturing (Like EUV and immersion) but also high end bonding equipment, E-Beam lithography, semiconductor metrology and nanoimprint lithography.
1- Nanometer-Picometer positioning tools.
2- Micrometer-Nanometer fabrication machine tools for ultra-precision optics manufacturing and ultra-precise semiconductor equipment components manufacturing.
Like I said many times, China is not just developing "a lithography machine", they are developing an entire supply chain for EUV and DUV lithography machines...AND other equipment that require ultraprecise precise machined optics, components and picometer positioning like Bonding tools, semiconductor metrology tools, nanoimprint lithography...
The interesting part is that a lot of this tooling require nanometer-picometer level positioning and surface measurement. so the investment that China did in ultraprecise positioning is paying itself in these tools. Is self-reinforcing.
Pushing the Limits of Precision! Three Key Leaps in the Ultra-Precision Optics and Micro/Nano Fabrication Industry
Domestically, Changsha ÅFiSy has been deeply involved in ultra-high precision ion beam polishing equipment, successively launching several new ion beam polishing machines with maximum processing part sizes ranging from 300 mm to 2 m. The equipment adopts a non-contact atomic-level removal principle, achieving a processing accuracy of angstrom (0.1 nm). The surface shape accuracy is better than λ/50 PV and λ/1000 RMS (λ=632.8 nm). It can process planar, spherical, aspherical, off-axis, and free-form surfaces, and is compatible with a variety of materials such as microcrystalline glass, ULE, fused silica, sapphire, and single-crystal silicon. EFORS has successfully broken the long-standing foreign monopoly in the field of ultra-high precision ion beam polishing, providing core domestically produced equipment support for cutting-edge fields such as aerospace, high-power lasers, and semiconductor lithography.
Equipment self-sufficiency: Domestically produced ultra-precision machining equipment accelerates its replacement of imports.
Ultra-precision machining equipment is the cornerstone of optical component manufacturing capabilities. For a long time, core equipment such as high-end single-point diamond lathes, magnetorheological polishing machines, ion beam shaping equipment, and ultra-precision grinding machines have been heavily reliant on imports. In recent years, domestic equipment manufacturers have made continuous breakthroughs in key areas such as spindle rotation accuracy, hydrostatic guideway technology, in-situ measurement and compensation, and environmental thermal stability. The positioning accuracy of five-axis CNC machine tools has improved from ±5μm to ±2μm or even higher; domestically produced femtosecond laser processing stations have achieved thermal damage-free micromachining of hard and brittle materials; and CNC grinding and polishing equipment has begun to integrate robot adaptive polishing and process databases. At the same time, the localization of tools for superhard materials has provided a new path for efficient and low-damage machining of hard and brittle materials.
Jiangsu Youpuna has been deeply committed to the independent research and development of core technologies, integrating hydrostatic shaft systems, air-bearing spindles, and nanometer-level intelligent CNC systems to create high-end optical aspherical composite grinding machines. Its products focus on ultra-precision mold processing scenarios in the fields of optics, optical communication, and semiconductors, achieving excellent key processing accuracy with a workpiece surface PV value ≤0.15μm and a surface roughness Ra<5nm, placing its technology at the forefront of international standards.
Haipu Ultra Precision (Beijing Haipu Ruisen) focuses on the manufacturing of ultra-precision high-end equipment, overcoming key challenges in hydrostatic technology and achieving independent production of core components such as hydrostatic spindles, rotary tables, and guideways. Equipped with self-developed CNC systems and machining software, it has formed a complete closed loop encompassing equipment R&D, complete machine manufacturing, and process services. Haipu Ultra Precision focuses on high-end fields such as aerospace, precision optics, and semiconductors, deeply cultivating the R&D and production of high-precision machine tools and complete sets of equipment. Adhering to independent innovation and leveraging its full-chain manufacturing advantages, it aims to create a benchmark for domestically produced ultra-precision equipment, contributing to the development of high-end manufacturing in China.
Harbin Bozhong Taida Optics & Precision Co., Ltd. , relying on the professional research team of Harbin Institute of Technology, is deeply engaged in the field of ultra-precision machining. Based on the achievements of national-level scientific research projects, the company focuses on the R&D, production, and technical services of high-end precision equipment. It possesses nanometer-level core technologies, and its core products cover ultra-precision diamond single-point lathes, roller mold processing machine tools, freeform surface measuring machines, and vertical mills such as the UPG650. These products achieve nanometer-level precision, enabling import substitution of key equipment and are widely used in optics, semiconductors, aerospace, and other fields.
Huacui Intelligent Equipment Co., Ltd. specializes in nanometer-level ultra-precision turning/grinding equipment. It has independently developed a liquid hydrostatic guideway + air hydrostatic spindle + high-precision motion control system, focusing on the UPC series of ultra-precision single-point diamond lathes and five-axis ultra-precision machining centers. These machines can perform optical-grade machining of planar, spherical, aspherical, off-axis curved, and free-form surfaces from materials such as copper, aluminum, single-crystal germanium, zinc selenide, and resin. Surface accuracy reaches the nanometer level, and roughness can reach the sub-nanometer level. They can also process micro-lens arrays, Fresnel lenses, and other micro-structured components, widely serving the fields of optics, semiconductors, aerospace, and infrared imaging.
Sichuan Shenggong Technology (a platform for the transformation of scientific research institute achievements) has been deeply involved in the field of ultra-precision optical processing equipment for 30 years. It has independently developed three core series: ultra-precision single-point diamond lathes, magnetorheological polishing machines, and high-precision CNC grinding machines, coupled with its own ultra-precision motion and control system. Its magnetorheological polishing equipment is specifically designed for high-steepness curved optical components, achieving a surface profile RMS≤2 nm and Ra≤0.3 nm. Its high-precision grinding machines can stably achieve a roundness better than 0.5 μm, meeting international embargo-level equipment standards. Products cover large-diameter optical components, semiconductor wafers, and infrared optical components. As a core supplier of domestically produced ultra-precision equipment, it has been showcased at the China International Optoelectronic Exposition for many consecutive years.