EDA access quietly restored to some Chinese companies following Xi-Trump call
According to feedback from several local Chinese IC design engineers and companies, Synopsys' technical support platform "SolvNetPlus" and Cadence's "Support Portal," which had been inaccessible due to US export controls, are now accessible again.
Yet this change has not been officially disclosed by either Synopsys or Cadence. Whether this restoration applies only to specific, less sensitive Chinese clients remains unclear.
We present laser damage behaviors of a series of high reflectivity extreme ultraviolet (EUV) mirrors with radiation of 13.5 nm femtosecond laser pulses generated by Shanghai Soft X-ray Free-Electron Laser (SXFEL) facilities. Mo/Si multilayer mirrors with and without B4C barrier layer of different designs were prepared by magnetron sputtering. The reflectivity of the mirrors was tested in National Synchrotron Radiation Laboratory of China at Hefei. A FEL-EUV laser damage testing station were designed and established in SXFEL. The 10Hz pulse train was delivered and focused to target plane with about 400μm2, and multi-shot damage behaviors of the witnesses were characterized. The damage morphologies were mapped comprehensively by several tools, including microscope, white light interferometer, SEM, TEM and Raman spectrum. The special bubble-like damage and compaction of multilayers were analyzed. |
Current optics damage and materials processing by EUV radiation are mainly relying on the free-electron-laser (FEL), synchrotron and laser produced plasma (LPP) light sources. The damage profiles are evaluated by the SEM, TEM, AFM and XPS etc. approaches. Subsequently, the damage threshold are given according to the pulse energy and the sample damage profiles, which remains some uncertainty. We have developed a high numerical aperture (NA~0.15) Hartmann wave front sensor for the EUV spectral region. This sensor has been successfully used for the EUV microscopy and sample damage study at FLASH-II. It firstly characterizes the beam spatial quality. The real-time measurement of the FEL wave front directly conducts the Schwarzschild optics alignment. With the benefit of capturing intensity and phase simultaneously, the EUV focus and beam profiles at the sample location can be precisely retrieved via retro-propagation. The wave-front sensing technique improves the EUV focusing quality, ensures sufficient power density, accurately provides full dose map of the sample damage area. The FEL-based EUV damage study is lack of the important dynamic information from femtosecond to picosecond time scale due to the synchronization limitations. Although there are a few EUV pump-IR/green-light-probe experiments have been performed, the long wavelength probe beam is inadequate to access the ultrafast process and the coating depth. By utilizing the wave-front sensing technique, the table-top EUV sources, such as gas-/surface-plasma-based high harmonics and plasma-based soft-x-ray lasers, could reach brilliant focus allowing to damage the samples. With the advantage of laser driven EUV sources, the EUV pump-EUV probe scheme can be realized with femtosecond-level delay. The wave-front sensing techniques are applicable for both pump and probe beams, have the potential to open a new era for EUV damage studies. |
I really hope that Chinese companies don't sleep in the laurels and start to moving to a more localized workflow. The US stooges are too unpredictable.
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