Yuanfu's thinning and dry polishing integrated machine unlocks a path to low cost and high yield.
jiangsu Yuanfu Semiconductor has successfully delivered a new "Thinning, Dry Polishing, and Film Application/Peeling Integrated Machine" to a major customer in the semiconductor packaging and testing sector. This equipment is designed to support advanced packaging production lines and the high-quality processing of ultra-thin wafers.
Driven by AI, autonomous driving, and consumer electronics, chips are becoming increasingly thin (pushing below 200µm). Traditional multi-step manufacturing processes (thinning, film peeling/applying, and die-cutting) are struggling with this trend. They cause mechanical stress, fragile wafer breakage during transport, and declining production yields, creating an urgent need for upgraded, integrated back-end packaging solutions.
The Machine combines back grinding, dry polishing, and protective film peeling/applying into a single machine, significantly improving production efficiency (UPH). Actively monitors and auto-adjusts parameters in real-time, keeping intra-wafer thickness deviation strictly within 1µm. This boosts both yield and efficiency. Eliminates the need for chemical agents used in traditional wet polishing, saving customers massive costs on wastewater treatment and factory infrastructure modifications. Features intelligent detection that monitors key parameters (grinding intensity, film pressure, etc.). It auto-corrects anomalies and automatically shuts down to prevent faults, shifting maintenance from reactive to proactive.
Other features include:
DAG Process Optimization: Solves ultra-thin chip processing issues and pairs seamlessly with Yuanfu’s picosecond laser grooving equipment for complex material separation.
DBG/SDBG Process Adaptation: Crucial for manufacturing HBM (High Bandwidth Memory) chips. It works with laser-guided hidden dicing to absorb warpage, allowing chip thickness to reach extreme limits of 25µm.
Mid-Process Use: Provides high flatness for thinning and planarization prior to wafer bonding.
Hardware Autonomy: Features highly precise TTV (Total Thickness Variation) control and a fully autonomous, self-managed spindle.
Self-Developed Consumables: Yuanfu manufactures its own thinning grinding wheels (ranging from 320 to 8000 grit). These ceramic and resin-bonded wheels outperform mainstream market products in lifespan and wear ratio, particularly for high-end CIS (CMOS Image Sensor) products.
Cost & Customization: Designed for easy maintenance and unmanned production. Yuanfu leverages standardized designs to keep costs down while rapidly fulfilling custom customer requests.
Yuanfu’s new integrated machine breaks through traditional manufacturing bottlenecks by combining ultra-high precision, smart automation, and dry processing. It offers semiconductor manufacturers a highly cost-effective, high-yield solution for the next generation of ultra-thin chips.