Apex: Empowering the Upgrading of the Wet Electronic Chemicals Industry with High-Purity Process Equipment Innovation
Apex Technology, a Shanghai-based innovator in high-purity process equipment for wet electronic chemicals, has been nominated for the prestigious IC Power List Annual Most Promising Growth Award at the 2026 IC Awards recognizing its rapid rise and technological breakthroughs in semiconductor and new energy materials. The awards, expanded this year to include 73 categories across nine sectors, are judged by over 100 semiconductor industry leaders and 500 CEOs.
Apex specializes in designing and manufacturing core system equipment for the production of ultra-pure chemicals essential in chip fabrication and battery manufacturing. Its comprehensive solutions span compounding, purification, synthesis, and supporting auxiliary systems—delivering end-to-end, contamination-free processes from raw materials to final packaging. Key capabilities include producing G4/G5 grade acids (e.g., hydrofluoric, sulfuric, nitric acid) and synthesizing critical reagents like photoresists and etching solutions.
High-Purity Purification Process System
At the heart of semiconductor-grade chemical production lies purity—critical for preventing defects in nanoscale chip manufacturing. Apex’s advanced purification systems are designed to deliver ultra-high-purity reagents at G4 and G5 levels (the highest tiers in industry standards), directly addressing the growing needs of 3nm and below process nodes.
The system specializes in purifying critical raw materials including:
Hydrofluoric acid (HF): Achieving G4/G5 purity for etching applications.
Hydrogen peroxide (H₂O₂): Produced at G3/G5 levels for safe, effective cleaning and oxidation processes.
Sulfuric acid (H₂SO₄): Purified to G4/G5 grades with stringent metal ion control (<10 ppb).
Nitric acid (HNO₃): Electronic-grade nitric acid meeting ultra-low particulate and metallic impurity specifications.
Hydrochloric acid (HCl) & other halogens: Processed through multi-stage filtration, distillation, and deionization to ensure reliability across sensitive applications.
These systems employ closed-loop design principles, advanced membrane filtration, ion exchange resins, and real-time monitoring of particle counts (<0.1μm), enabling consistent output quality essential for high-volume production environments.
High-Purity Mixing Process System
Precise formulation is vital to the performance of wet chemicals used in photolithography, cleaning, etching, and polishing processes. Apex’s mixing systems are engineered for extreme accuracy, reproducibility, and contamination control—ensuring stable batch-to-batch consistency.
Multi-component dosing technology with micron-level precision.
Integration of real-time particle monitoring, online pH/temperature sensors, and automatic calibration mechanisms.
- Compatibility with a wide range of critical reagents such as:
Photoresists and diluents
Developers and stripping solutions (for post-exposure development)
Etching solutions (e.g., HF/HNO₃ mixtures for silicon etch)
Cleaning agents (SC1/SC2, RCA clean formulations)
CMP slurry preparation systems
Electroplating baths (Cu, Ni, Co) for advanced interconnects
The system also incorporates
dedicated canning stations with nitrogen purging and sealed transfer paths, along with
ultra-fine filtration modules (0.1μm/0.05μm)to prevent particle contamination during dispensing—ensuring zero secondary pollution even in the final packaging stage.

High-Purity Synthesis Process System
For complex chemical synthesis required in semiconductor materials like photoresists, polymers, and functional additives, Apex delivers fully integrated, modular synthesis platforms capable of executing sensitive reactions under controlled conditions.
This system supports:
Polymerization (e.g., for resist resins)
Esterification & Transesterification (to tailor molecular weight and solubility profiles)
Acid-base neutralizations, condensation, and catalytic reactions
Applications include the production of:
Positive and negative photoresist formulations
Stripping agents for advanced patterning layers
Cleaning solutions with tailored surface tension properties
The system is designed as a fully automated, end-to-end solution—from raw material feeding and controlled reaction (with temperature/pressure regulation) to final concentration via vacuum distillation, multi-stage filtration, degassing, and sterile packaging. This seamless integration reduces human intervention, minimizes batch variability, and enhances traceability.

Supporting Auxiliary Systems
To ensure continuous, stable operation across long production runs, Apex provides critical auxiliary systems:
Solid-Liquid Separation Units: High-efficiency centrifuges and membrane filters for removing residual solids without introducing contamination.
High-Purity Powder Drying Systems: Used in the processing of dry chemical intermediates, featuring inert gas (N₂) flushing to prevent oxidation or moisture absorption.
Degassing Towers: Equipped with vacuum-assisted systems that eliminate dissolved gases (e.g., O₂, N₂) from liquids—vital for preventing bubble formation during etching and deposition.
These components are designed to operate in ultra-clean environments and seamlessly integrate into the main process flow, improving overall system uptime and product yield.
Core Equipment & Customized Cabinets
Apex manufactures specialized high-performance equipment built with materials resistant to aggressive chemicals:
Corrosion-resistant reactors made from PTFE-lined stainless steel or specialty alloys (e.g., Hastelloy C276).
High-efficiency heat exchangers for precise temperature control during reactions.
Filter tanks and precision valves designed for long-term durability under high-purity conditions.
The company also develops customized cabinets tailored to specific workflow needs, including:
Liquid feeders with zero-leak seals
Particle removal filtration process cabins (classified as Class 100 cleanroom-compatible)
Automated filling stations supporting diverse container sizes—from small 4L/20L drums to large 200L and 1,000L tank trucks
These cabinets are engineered with sealed transfer pathways, inert gas purging, and real-time monitoring, ensuring that chemical integrity is maintained throughout transport and delivery critical for preventing post-processing contamination.
Closed-Loop Solutions & End-to-End Service Ecosystem
Beyond hardware, Apex delivers a comprehensive service model rooted in collaboration and lifecycle support:
Strategic partnerships with global industry leaders such as DuPont, Daikin, ALMATEC, Milton Roy, and Entegris, enabling seamless integration of best-in-class components.
A full-service approach: from initial needs assessment and customized engineering design to installation, commissioning, training, and long-term after-sales maintenance & technical support.
All systems comply with international standards:
ISO 9001 (Quality Management)
ISO 14001 (Environmental Management)
SEMI S2 (Safety Standard for Semiconductor Equipment)
Additionally, Apex holds certifications and qualifications to manufacture
hazardous chemical equipment, including pressure vessels and sealed reactors ensuring compliance with stringent safety codes across China and international markets.