Chinese semiconductor industry

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tokenanalyst

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Topazchen

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tokenanalyst

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Shanghai Ic Equipment Material Industry Innovation Center Co Ltd
Shanghai IC R&D Center Co Ltd​

CN214795565U


Cleaning device of extreme ultraviolet lithography machine​

Abstract​

The utility model provides a belt cleaning device of extreme ultraviolet lithography machine, include: the device comprises an exposure vacuum cavity, wherein a workpiece table, an objective lens device, a glow discharge device, an inflation device connected with an inflation end of the exposure vacuum cavity and a vacuum pumping device connected with a pumping end of the exposure vacuum cavity are arranged in the exposure vacuum cavity; wherein the workpiece table is provided with a wafer bearing disc; the glow discharge device comprises a glow discharge ring and a glow power supply device connected with the glow discharge ring; the glow discharge ring is suspended above the wafer bearing plate and surrounds the wafer bearing plate. The exposure vacuum cavity is provided with the glow discharge device surrounding the workpiece table, and photoresist or other pollutants adsorbed in the exposure vacuum cavity are cleaned through the glow discharge device, so that frequent shutdown maintenance operation is avoided.​

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FriedButter

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According to South Korean customs data, South Korea saw the first single month trade deficit with China, its largest trading partner, in May. A sharp 40.9-percent-incresase in Chinese-made semiconductors was believed to be behind the reverse.

Amid the US tech crackdown, the Chinese mainland’s semiconductor industry has made progress and for the first time the country's three top chipmakers – SMIC, HuaHong and Nexchip – accounted for more than 10 percent of global foundry revenue in the first quarter of 2022, according to media reports.

Rest of the article is unrelated on the topic of domestic semiconductors.
 
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