According to Havok, 0.1~0.2μm is enough for DUV. EUV need 0.05μm though.
On May 18, 2021, Beijing PMT Co., Ltd. and the team of Dr. Yang Huaijiang, Guowang Optics, Changchun Institute of Optics and Mechanics, Chinese Academy of Sciences, developed the lithography machine objective lens system ultra-precision grinder ULTR-700VG passed the National Machine Tool Quality Supervision and Inspection Test Central inspection. The accuracy of the grinder is 0.1~0.2μm, which optimizes environmental interference and can be stable to 0.1μm. The next target has a diameter of 2000mm and an accuracy of 0.05μm. Such high-precision ultra-precision CNC machine tools have important strategic and economic significance for my country's chip, optics, aerospace, and defense industries to break through foreign blockades and realize the independent and controllable development of high-precision technology and equipment.
2021年5月18日,北京博鲁斯潘精密机床有限公司与中国科学院长春光机所国望光学杨怀江博士团队合作研发的光刻机物镜系统超精密磨床ULTR-700VG通过国家机床质量监督检验检测中心检测。该磨床精度0.1~0.2μm,优化环境干扰,可以稳态到0.1μm。下一个目标直径2000mm,精度0.05μm。该类高精尖超精密数控机床对我国芯片、光学、航空航天、国防工业突破国外封锁,实现高精尖技术与装备的自主可控发展,具有重要的战略意义和经济意义。