The diagram looks about right.
China has already finished developing a 100% Indigenous 28nm Production line. The new SMEE 28nm DUV will initially be used on this production line.
The Research and Development is now currently focused on the development of 14nm Semiconductor Equipment.
The 14nm node is important as it will produce the first 14nm FINFET Chips in China.
I also noticed that Research is already being done on 5nm and 7nm Semiconductor Equipment.