these companies don't need too many people because its a small volume, high specialization field.
For example Canadian company Angstrom Engineering is similar. They only have 50-200 employees yet they have 25-50 million USD revenue and can support a large variety of PVD/CVD products at the R&D and pilot production scale.
Note that they're producing
R&D and pilot scale systems though. A huge company like Lam Research or Applied Materials does this for
production scale systems. What's the difference?
1. wafer size. Notice how most of Angstrom Engineering's systems are 200 mm or smaller and are single wafer per chamber. Lam Research and Applied Materials does 300 mm systems. It costs way more to machine a 300 mm chamber than a 200 mm chamber. You can buy commercially available chambers for 200 mm or single 300 mm. Or you can fabricate them with standard diameter stainless tubing, standard CNC tools and TIG welding. it is expensive for an individual, but cheap for a company. When you go to 300 mm production scale chambers, you need customized chambers fabricated by methods like hollowing out a solid block of aluminum such that it is entirely weldless.
2. reliability. this is not about business or statistics, this is technical. For example I bet that Angstrom Engineering's chambers are stainless interior. That's fine for R&D or pilot where you just need high purity and for it to work in a non-aggressive environment. But what if you're running 24/7 production cycle with highly aggressive gases like plasma CVD? These gases corrode stainless and sputter off Fe, Cr containing contaminants. It isn't much - maybe amounts to just ppm or ppb level. But that's too much for a leading edge fab. Lam and AMAT have proprietary coatings to resist plasma corrosion and contamination. It in fact needs to not only resist process based corrosion but also in situ cleaning agents i.e. reactive fluorine or oxygen containing plasmas that are designed to volatilize silicon and metal oxides. This in turn requires proprietary processes to conformal coat an oddly shaped piece of metal with a thin yet uniform film that can have absolutely no holes in it.
3. automation and control. Angstrom engineering might have a wafer hot stage that controls the temperature. Lam Research might have a properitary wafer hot stage that has 100 temperature control zones that can keep wafer temperature uniform at +/- 0.1 degrees even right up to the edge of the wafer. Angstrom engineering might have a PLC based program that can automate internal workflows. AMAT tools might have seamless integration with external wafer handling robots built by other companies.
4. own IP. Angstrom engineering might buy alot of its components elsewhere. it's not easy to have 50-200 people be able to do controls, metallurgy, plasma chemistry, thermal engineering, electrical power engineering, R&D, sales, etc. they might say, buy the plasma source, or buy the electrical power supply, buy the chambers, etc and focus on integration and a few "specialties". Big companies don't have to choose. They can just take as much internal as they need to.
5. quality control. They definitely won't have an internal QC lab with a paper trail for every component to ensure that it is clean. They'll ship the systems and solve the problems as they come up because it's not like their systems lose millions per day they're down. But a company like Lam or AMAT have like 50 people handling the paperwork alone because going down for even 1 hour is a concern.