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深蓝:上微800系列的干式双工台版本光刻机,在产线调通了吗,可以大批量制造芯片了否?
havok:90nm差不多了,不是燕东4月要试产了么?90nm光刻机在燕东调试快有2年了,20年的时候就在那里了
王鑫:浸没式内部结构像不像ASML的浸没式?
havok:干式像 浸没就肯定像,90nm机和28nm机的内部结构没多大差别
深蓝:Has the 800 series dry-type dual-station version lithography machine of SMEE been adjusted in the production line, and can it manufacture chips in large quantities?
havok:90nm is almost ready, isn't Yandong going to trial production in April? The 90nm lithography machine has been debugging in Yandong for almost 2 years now, it has been there since 2020
王鑫:Is SMEE's immersive-type machine's internal structure similar to ASML's immersive-type?
havok:Yes, if the dry-type is similar than the immersive-type will be similar as well,the internal structure of 90nm machine and 28nm machine is not much different
深蓝:上微800系列的干式双工台版本光刻机,在产线调通了吗,可以大批量制造芯片了否?
havok:90nm差不多了,不是燕东4月要试产了么?90nm光刻机在燕东调试快有2年了,20年的时候就在那里了
王鑫:浸没式内部结构像不像ASML的浸没式?
havok:干式像 浸没就肯定像,90nm机和28nm机的内部结构没多大差别
深蓝:Has the 800 series dry-type dual-station version lithography machine of SMEE been adjusted in the production line, and can it manufacture chips in large quantities?
havok:90nm is almost ready, isn't Yandong going to trial production in April? The 90nm lithography machine has been debugging in Yandong for almost 2 years now, it has been there since 2020
王鑫:Is SMEE's immersive-type machine's internal structure similar to ASML's immersive-type?
havok:Yes, if the dry-type is similar than the immersive-type will be similar as well,the internal structure of 90nm machine and 28nm machine is not much different