This is probably one of the many subtle confirmations that we will see more of in the coming years leading up to 2025.@Overbom Yup BUT the article is correct regarding the breakthroughs BUT the Timeline is too optimistic...lol, we have to wait until they finished the SSMB construction in 2025. I think the article meaning of delivery is that they finished the project not the product itself. (due to construction constraint). And @WTAN Sir an Official confirmation? Seems like they're confident on going the SSMB route?
I believe that there are 2 Official EUVL Light Source projects being pursued and it is LPP and SSMB.
In 2025 or even earlier, if a large part of the equipment is installed and it works as planned, they will certainly go ahead with SSMB as a Light Source for Domestic EUVL.
Personally speaking, it is probably easier in terms of technical difficulty to develop SSMB than to develop LPP.
LPP is extremely complicated and requires a powerful MOPA Laser and the ability to irradiate a tiny tin droplet in vacuum to generate EUV radiation.
Also not mentioning the Patent issues with this Light Source.
I am not saying China cant develop LPP, it can if it really wants to.
But the Synchrotron being a more traditional type of technology, would be less technically difficult and hence a greater chance of success.