Excited shouts broke the tranquility of a night in midsummer this year. In sharp contrast to this tranquility, it was the fiery hearts of researchers. Here is the Shuoke Zhongkexin Equipment R&D Center located in the southeast corner of Beijing. As a subsidiary of China Electronics Technology Group Co., Ltd. ("China Electronics"), the R&D team of Shuoke Zhongkexin Equipment Research and Development Center has been tackling key problems day and night. The long-standing high-energy ion implanter core technical difficulties finally achieved a breakthrough. Today, the first domestic high-energy ion implanter independently developed by the team has successfully entered the advanced integrated circuit production line.
The high-energy ion implanter is the most technically difficult model in the ion implanter. The overcoming of this core technology has further inspired the Chinese people. Self-improvement, science and technology serve the country! The cadres and masses of CETC are full of pride and hard work, and take practical actions to welcome the victory of the Party's 20th National Congress.
"We must give full play to the advantages of the complete industrial chain in the field of electronic information, coordinate strategic needs, maintain perseverance, make up for shortcomings and weaknesses, strengthen the strategic thinking of 'asymmetric' catching up and surpassing, use strengths to complement weaknesses, change lanes to overtake, and resolutely win The key and core technology is a tough battle." Chen Zhaoxiong, chairman and party secretary of CETC, emphasized.
As the key equipment for the manufacture of integrated circuit chips, the development of ion implanter equipment is extremely difficult, and the research and development foundation in my country is relatively weak. With the ideal of serving the country with science and technology, the R&D team of CETC has continuously challenged the development of key equipment. Independent innovation and development of full-spectrum ion implanters such as semiconductors.
The breakthrough of high-energy ion implanter technology is a microcosm of China Electric Power's efforts to serve the country. CETC implements the spirit of the important instructions and instructions of General Secretary Xi Jinping, gives play to the important role of the national strategic scientific and technological strength of the group company, is determined, maintains perseverance, finds the right focus, accelerates the improvement of the shortcomings of the industrial chain and the supply chain, and enhances the control of key core technologies. .
One technical gap after another has been filled, and one country's heavy equipment has been born... Walking into the purification plant of China Electric Power Research Institute 45, there are several equipment to be debugged, and engineers are busy and orderly. "Our self-developed CMP (chemical mechanical polishing) equipment has successfully entered the customer site for verification, and the test data is good." The relevant person in charge of the 45th China Electric Power Research Institute told reporters.
In the first half of 2022, China Electronics Technology's CMP equipment can be described as good news. The domestic market share of 200mm chemical mechanical polishing (CMP) equipment has increased significantly, and the cumulative tape-out of 300mm CMP equipment has reached tens of thousands. The sales revenue and profit of CMP equipment far exceed the same period last year...
CMP is one of the key equipments for chip manufacturing. Because of its high-precision and high-density technical requirements, it has become the "ceiling" of the integrated circuit equipment industry. The party group of CETC attaches great importance to the research and development of CMP. Chen Zhaoxiong, secretary of the party group and chairman of the board, held several special meetings to study and promote it, and encouraged the team to cultivate original innovation capabilities and fight the battle of key core technologies. The CETC team bravely took on the mission, worked together and worked together to tackle the tough problems. In the time segment of cloudy, sunny, cold and warm, summer and winter snow, and morning and twilight, the team of China Electronics Technology Co., Ltd. spread the hard work and sweat of research and development. After verification, the first 200mm CMP commercial machine with completely independent intellectual property rights in China was successfully developed in 2017. After strict "marathon" testing, the integrated circuit production line was finally launched. This heavy report card in the first half of this year embodies the countless efforts and sweat of the CETC team.
In recent years, CETC has actively deployed a number of key industrial fields such as integrated circuit manufacturing equipment and wide-bandgap semiconductors, and achieved remarkable results: around the field of electronic manufacturing equipment and electronic functional materials that support the development of the integrated circuit industry, CETC has formed ionic Fist products such as injection machine and CMP, the industrial scale of key manufacturing equipment for integrated circuits, the pace of product serialization has been significantly accelerated, and the support capabilities in key areas have been continuously enhanced, effectively improving the modernization level of the industrial chain and supply chain; focusing on semiconductor manufacturing and semiconductor applications, China Electronics Technology Co., Ltd. Continue to conquer hundreds of key core technologies and fill the gap in the industry chain; focus on building a local integrated circuit and wide-bandgap semiconductor equipment verification platform, and continuously improve the core competitiveness of packaging and assembly, new energy, new display equipment and its intelligent manufacturing integration services .
Celebrating the 20th National Congress of the Communist Party of China, CETC will continue to target the country's major strategic needs in the next step, make all-out efforts in key core technologies, and make greater contributions to high-level scientific and technological self-reliance and self-improvement.
